Acquisition of a Surface Profiler to be made available through the Center for Nanoscale Science and Engineering (RPA Pilot / Seed Project)

We propose the purchase of a surface profiler for measurement of thin-film feature heights, surface roughness, and surface curvature. Surface profilers are “workhorse” instruments that are used throughout materials deposi􀆟on, etching, and paterning/machining processes. The proposed profiler will replace a 20-year-old system in the Center for Nanoscale Science and Engineering that recently failed. The profiler will be one of only two at U.K. and the only such instrument on main campus or available through an open user center.