Grants and Contracts Details
Description
No abstract available
| Status | Finished |
|---|---|
| Effective start/end date | 9/1/04 → 3/31/06 |
Funding
- KY Science and Technology Co Inc: $14,973.00
KSEF R&D Excellence: Level-to-Level Alignment with Nanometer Accuracy for Electron-Bem Lithography
- Hastings, Jeffrey (PI)