Projects and Grants per year
Grants and Contracts Details
Description
The purpose of this supplemental funding request is to support undergraduate research for
an electrical engineering major in the areas of semiconductor device fabrication and
nanomanufacturing. The student will receive training in how to plan, conduct, document,
and communicate scientific and engineering research. The student will participate in the
investigation of the effect of reactive gases on electron beam lithography, a key
technology for integrated circuit mask production and direct-write prototyping of nano-
electronic and photonic devices. This effort twill include specific training in electron-
beam lithography and a variety of materials characterization techniques.
Status | Finished |
---|---|
Effective start/end date | 1/1/22 → 12/31/24 |
Funding
- National Science Foundation
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Projects
- 1 Finished
-
BRITE Synergy: Tranforming Electron Beam Lithography with Reactive Gases
Hastings, J. (PI)
1/1/22 → 12/31/24
Project: Research project