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REU: BRITE Synergy: Transforming Electron Beam Lithography with Reactive Gases
Hastings, Jeffrey
(PI)
Electrical and Computer Engineering
Overview
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Projects & Grants
(1)
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Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.
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Earth and Planetary Sciences
Electron Beam
100%
Reactive Gas
100%
Electrical Engineering
33%
Integrated Circuit
33%
Semiconductor Device
33%
Photonics
33%
Engineering
Electron Optical Lithography
100%
Materials Characterization Techniques
33%
Photonic Devices
33%
Semiconductor Device Fabrication
33%
Electrical Engineering
33%
Nanoelectronics
33%
Integrated Circuit
33%
Engineering Research
33%