REU: BRITE Synergy: Transforming Electron Beam Lithography with Reactive Gases

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• Finished

  BRITE Synergy: Tranforming Electron Beam Lithography with Reactive Gases

  Hastings, J. (PI)

  National Science Foundation

  1/1/22 → 12/31/24

  Project: Research project

  • Electron Beam 100%
  • Reactive Gas 100%
  • Electron Optical Lithography 100%
  • Lithography 100%
  • Proximity Effect 12%