Student Support for EIPBN 2019 Conference

Project Summary: This is to request support, in the amount $5,000, to enable students to attend the 63rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN) 2019, to be held at the Hyatt Regency Minneapolis in Minneapolis, Minnesota, May 28- 31, 2019. The EIPBN Conference is recognized as the foremost international meeting dedicated to lithographic science and technology and its application to micro and nanofabrication techniques. The conference brings together engineers and scientists from industries and universities from all over the world to discuss recent progress and future trends. Among the emerging technologies that are within the scope of EIPBN is Nanofabrication for Energy Sources along with nanofabrication for the realization of low power integrated circuits. There will be three days of technical presentations at this year’s conference in Minneapolis starting with a plenary session and poster session and followed by 30 sessions (grouped in 10 sets of 3 parallel sessions). The conference averages over 400 submitted abstracts from more than 20 countries. Papers presented at the 2019 conference that pass peer review will be published in the Nov./Dec. 2019 issue of the Journal of Vacuum Science and Technology B. Every year, EIPBN provides financial support for students to attend the conference. The steering committee and attendees view students as the lifeblood of the conference, in that they both provide a fresh and exciting perspective, and also become the scientists attending the conference in the future on a regular basis. This support provides for their travel to the conference and usually comes from a mixture of government agencies and private donors. The DOE funds received by the conference will provide air travel expenses for 12 students. Although student support will be provided to overseas students as well, DOE funds will only be distributed to students attending American universities. All students who receive travel aid present papers at the conference assist in managing the A/V requirements during technical sessions.