6.2: Optimizing osmium-ruthenium films to inhibit tungsten interdiffusion

Phillip D. Swartzentruber, Wen Chung Li, Thomas J. Balk, Scott Roberts

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

Osmium-ruthenium thin films were deposited on porous tungsten pellets, at the same time as cathode assemblies, to investigate possibilities for minimizing interdiffusion. Previous studies had identified promising film characteristics for inhibiting tungsten interdiffusion. For example, it was found that a 5W-substrate-biased film of 550 nm thickness exhibited high structural and compositional stability, and several other films exhibited promising properties as well. These films were produced and annealed, then analyzed for composition. Emission tests of M-type cathode assemblies, coated with the same candidate films, were performed to assess the degree of lifetime improvement imparted by the films to the cathodes.

Original languageEnglish
Title of host publication2010 IEEE International Vacuum Electronics Conference, IVEC 2010
Pages73-74
Number of pages2
DOIs
StatePublished - 2010
Event2010 IEEE International Vacuum Electronics Conference, IVEC 2010 - Monterey, CA, United States
Duration: May 18 2010May 20 2010

Publication series

Name2010 IEEE International Vacuum Electronics Conference, IVEC 2010

Conference

Conference2010 IEEE International Vacuum Electronics Conference, IVEC 2010
Country/TerritoryUnited States
CityMonterey, CA
Period5/18/105/20/10

Keywords

  • Dispenser cathode
  • Interdiffusion
  • M-coating
  • M-type
  • Microstructure
  • Osmium
  • Ruthenium
  • Thin film

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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