6.2: Optimizing osmium-ruthenium films to inhibit tungsten interdiffusion

Phillip D. Swartzentruber, Wen Chung Li, Thomas J. Balk, Scott Roberts

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Fingerprint

Dive into the research topics of '6.2: Optimizing osmium-ruthenium films to inhibit tungsten interdiffusion'. Together they form a unique fingerprint.

Engineering & Materials Science