Aö-Orientation Yba2Cu3O7 Films Grown on Mgo Substrates with A C-Axis Layer Buffer By Rf-Sputtering Method

Sijia Wu; K. W. Ng

doi:10.1109/77.233388

Aö-Orientation Yba2Cu3O7 Films Grown on Mgo Substrates with A C-Axis Layer Buffer By Rf-Sputtering Method

Research output: Contribution to journal › Letter › peer-review

Abstract

ab-plan oriented YBa2Cu3O7 thin film has been deposited on a thin c-axis layer with MgO as substrate by rf sputtering technique. Superconducting transition is much better than that deposited directly on the MgO substrate. We have investigated the differences by X-ray diffraction, reflection high energy electron diffraction, and scanning electron microscope. The same technique has been applied to yttrium stabilized zirconia and yielded similar results.

Original language	English
Pages (from-to)	1287-1289
Number of pages	3
Journal	IEEE Transactions on Applied Superconductivity
Volume	3
Issue number	1
DOIs	https://doi.org/10.1109/77.233388
State	Published - Mar 1993

Bibliographical note

Funding Information:
A two inches rf sputtering gun is used in our experiment. To avoid re-sputtering of the thin film by the oxygen ion, we use the off axis technique by putting the substrate perpendicular to the gun plane [4]. Sputtering was done at a Manuscript received August 24, 1992. This work is supported by the National Science Foundation (DMR 8913854) and the University of Kentucky Research Foundation.

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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title = "A{\"o}-Orientation Yba2Cu3O7 Films Grown on Mgo Substrates with A C-Axis Layer Buffer By Rf-Sputtering Method",

abstract = "ab-plan oriented YBa2Cu3O7 thin film has been deposited on a thin c-axis layer with MgO as substrate by rf sputtering technique. Superconducting transition is much better than that deposited directly on the MgO substrate. We have investigated the differences by X-ray diffraction, reflection high energy electron diffraction, and scanning electron microscope. The same technique has been applied to yttrium stabilized zirconia and yielded similar results.",

author = "Sijia Wu and Ng, {K. W.}",

note = "Funding Information: A two inches rf sputtering gun is used in our experiment. To avoid re-sputtering of the thin film by the oxygen ion, we use the off axis technique by putting the substrate perpendicular to the gun plane [4]. Sputtering was done at a Manuscript received August 24, 1992. This work is supported by the National Science Foundation (DMR 8913854) and the University of Kentucky Research Foundation.",

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AU - Wu, Sijia

AU - Ng, K. W.

N1 - Funding Information: A two inches rf sputtering gun is used in our experiment. To avoid re-sputtering of the thin film by the oxygen ion, we use the off axis technique by putting the substrate perpendicular to the gun plane [4]. Sputtering was done at a Manuscript received August 24, 1992. This work is supported by the National Science Foundation (DMR 8913854) and the University of Kentucky Research Foundation.

PY - 1993/3

Y1 - 1993/3

N2 - ab-plan oriented YBa2Cu3O7 thin film has been deposited on a thin c-axis layer with MgO as substrate by rf sputtering technique. Superconducting transition is much better than that deposited directly on the MgO substrate. We have investigated the differences by X-ray diffraction, reflection high energy electron diffraction, and scanning electron microscope. The same technique has been applied to yttrium stabilized zirconia and yielded similar results.

AB - ab-plan oriented YBa2Cu3O7 thin film has been deposited on a thin c-axis layer with MgO as substrate by rf sputtering technique. Superconducting transition is much better than that deposited directly on the MgO substrate. We have investigated the differences by X-ray diffraction, reflection high energy electron diffraction, and scanning electron microscope. The same technique has been applied to yttrium stabilized zirconia and yielded similar results.

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JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

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ER -

Aö-Orientation Yba2Cu3O7 Films Grown on Mgo Substrates with A C-Axis Layer Buffer By Rf-Sputtering Method

Abstract

Bibliographical note

ASJC Scopus subject areas

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