Abstract
ab-plan oriented YBa2Cu3O7 thin film has been deposited on a thin c-axis layer with MgO as substrate by rf sputtering technique. Superconducting transition is much better than that deposited directly on the MgO substrate. We have investigated the differences by X-ray diffraction, reflection high energy electron diffraction, and scanning electron microscope. The same technique has been applied to yttrium stabilized zirconia and yielded similar results.
| Original language | English |
|---|---|
| Pages (from-to) | 1287-1289 |
| Number of pages | 3 |
| Journal | IEEE Transactions on Applied Superconductivity |
| Volume | 3 |
| Issue number | 1 |
| DOIs | |
| State | Published - Mar 1993 |
Bibliographical note
Funding Information:A two inches rf sputtering gun is used in our experiment. To avoid re-sputtering of the thin film by the oxygen ion, we use the off axis technique by putting the substrate perpendicular to the gun plane [4]. Sputtering was done at a Manuscript received August 24, 1992. This work is supported by the National Science Foundation (DMR 8913854) and the University of Kentucky Research Foundation.
Funding
A two inches rf sputtering gun is used in our experiment. To avoid re-sputtering of the thin film by the oxygen ion, we use the off axis technique by putting the substrate perpendicular to the gun plane [4]. Sputtering was done at a Manuscript received August 24, 1992. This work is supported by the National Science Foundation (DMR 8913854) and the University of Kentucky Research Foundation.
| Funders | Funder number |
|---|---|
| National Science Foundation (NSF) | DMR 8913854 |
| Northern Kentucky University Research Foundation |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering