A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

Qinglin Zhang; Xingcheng Xiao; Yang Tse Cheng; Mark W. Verbrugge

doi:10.1063/1.4892539

A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

Qinglin Zhang, Xingcheng Xiao, Yang Tse Cheng, Mark W. Verbrugge

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al₂O₃ films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple applications.

Original language	English
Article number	061901
Journal	Applied Physics Letters
Volume	105
Issue number	6
DOIs	https://doi.org/10.1063/1.4892539
State	Published - Aug 11 2014

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.4892539

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title = "A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition",

abstract = "The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al2O3 films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple applications.",

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AU - Zhang, Qinglin

AU - Xiao, Xingcheng

AU - Cheng, Yang Tse

AU - Verbrugge, Mark W.

PY - 2014/8/11

Y1 - 2014/8/11

N2 - The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al2O3 films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple applications.

AB - The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al2O3 films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple applications.

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A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

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