A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

Qinglin Zhang, Xingcheng Xiao, Yang Tse Cheng, Mark W. Verbrugge

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al2O3 films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple applications.

Original languageEnglish
Article number061901
JournalApplied Physics Letters
Volume105
Issue number6
DOIs
StatePublished - Aug 11 2014

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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