MEMS resonators integrated with CMOS feedback networks have a potentially wide field of applications as oscillator circuits in communications and sensor systems. However, considerable advancements to this nascent technology are required to realize such a vision. We present a configurable CMOS chip which facilitates the development of MEMS-referenced oscillators, especially for timing and sensing applications in harsh environments. The chip has been designed in the OnSemi 3M2P 0.5 μm process. It supports MEMS resonators with various frequencies (10-120 kHz), resonant modes, and impedance levels, thus allowing interfacing to a wide range of devices. This paper describes analysis, design, and simulation results.
|Title of host publication||14th IEEE International NEWCAS Conference, NEWCAS 2016|
|State||Published - Oct 20 2016|
|Event||14th IEEE International NEWCAS Conference, NEWCAS 2016 - Vancouver, Canada|
Duration: Jun 26 2016 → Jun 29 2016
|Name||14th IEEE International NEWCAS Conference, NEWCAS 2016|
|Conference||14th IEEE International NEWCAS Conference, NEWCAS 2016|
|Period||6/26/16 → 6/29/16|
Bibliographical noteFunding Information:
This work was partially funded by a National Science Foundation Grant (ECCS-1509721).
© 2016 IEEE.
ASJC Scopus subject areas
- Computer Networks and Communications
- Electrical and Electronic Engineering