Abstract
There are established macroscale fabrication methods to create parts of virtually any shape or size; but for components in the microscale range (thousands to tens of microns) there is a dearth of options for making 3D parts at high enough throughput to make them practical. This paper demonstrated a novel method to create novel micromolding processes that are capable of creating defect-free microscale structures with controllable three-dimensional (3D) geometry, aligned two-sided patterns, a variety of material properties, integration of multiple materials into single structures, and high fabrication throughput. While some methods are available that are capable of meeting a few of these goals, nothing exists in the current microfabrication repertoire that can accomplish all simultaneously.
Original language | English |
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Title of host publication | 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 |
Pages | 631-634 |
Number of pages | 4 |
ISBN (Electronic) | 9781509030590 |
DOIs | |
State | Published - Aug 25 2017 |
Event | 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, United States Duration: Apr 9 2017 → Apr 12 2017 |
Publication series
Name | 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 |
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Conference
Conference | 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 |
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Country/Territory | United States |
City | Los Angeles |
Period | 4/9/17 → 4/12/17 |
Bibliographical note
Publisher Copyright:© 2017 IEEE.
Funding
ACKNOWLEDGMENTS This technology was supported in part by Key deployment project of Chinese Academy of Sciences (Grant NO. KFZD-SW-202), an award from the Kentucky Cabinet for Economic Development, Office of Commercialization and Innovation, under the Grant Agreement KSTC-184-512-12-122 with the Kentucky Science and Technology Corporation and by the National Institute of Standards and Technology under Grant SB1341-11-SE-0864.
Funders | Funder number |
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Kentucky Cabinet for Economic Development | |
Kentucky Science and Technology Corporation | |
Office of Commercialization and Innovation | KSTC-184-512-12-122 |
National Institute of Standards and Technology | SB1341-11-SE-0864 |
Chinese Academy of Sciences | KFZD-SW-202 |
Keywords
- Freestanding
- aligned mask micromolding
- biomedical
- microstructures
- three-dimensional
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Electronic, Optical and Magnetic Materials
- Instrumentation