There are established macroscale fabrication methods to create parts of virtually any shape or size; but for components in the microscale range (thousands to tens of microns) there is a dearth of options for making 3D parts at high enough throughput to make them practical. This paper demonstrated a novel method to create novel micromolding processes that are capable of creating defect-free microscale structures with controllable three-dimensional (3D) geometry, aligned two-sided patterns, a variety of material properties, integration of multiple materials into single structures, and high fabrication throughput. While some methods are available that are capable of meeting a few of these goals, nothing exists in the current microfabrication repertoire that can accomplish all simultaneously.
|Title of host publication||2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017|
|Number of pages||4|
|State||Published - Aug 25 2017|
|Event||12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 - Los Angeles, United States|
Duration: Apr 9 2017 → Apr 12 2017
|Name||2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017|
|Conference||12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017|
|Period||4/9/17 → 4/12/17|
Bibliographical noteFunding Information:
ACKNOWLEDGMENTS This technology was supported in part by Key deployment project of Chinese Academy of Sciences (Grant NO. KFZD-SW-202), an award from the Kentucky Cabinet for Economic Development, Office of Commercialization and Innovation, under the Grant Agreement KSTC-184-512-12-122 with the Kentucky Science and Technology Corporation and by the National Institute of Standards and Technology under Grant SB1341-11-SE-0864.
© 2017 IEEE.
- aligned mask micromolding
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Electronic, Optical and Magnetic Materials