ab-oriented YBa2Cu3O7 thin film grown on c-axis layer by radio frequency sputtering

Sijia Wu, K. W. Ng, J. D. Robertson, R. J. Jacob

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

YBa2Cu3O7 films can be grown on different substrates by the off-axis ac magnetron sputtering method. Films in the ab orientation tend to grow at a lower substrate temperature than c-axis films. However, as the temperature is lowered, all the substrates we have tested, except for SrTiO3, form amorphous phases that degrade the quality of the films being made. In this manuscript it is shown that if a thin layer of c-axis film is deposited on the substrate first, then it effectively reduces the formation of the amorphous phases and improves the film quality significantly.

Original languageEnglish
Pages (from-to)5337-5340
Number of pages4
JournalJournal of Applied Physics
Volume72
Issue number11
DOIs
StatePublished - 1992

ASJC Scopus subject areas

  • Physics and Astronomy (all)

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