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Application of the deuterium sintering process to improve the device design rule in reducing plasma induced damages
Young Kwang Kim, Seok Ha Lee, Hyui Seung Lee, Bong Seok Kim, Yong Hee Lee, Jinju Lee, Kangguo Cheng, Zhi Chen, Karl Hess, Joseph W. Lyding
Research output: Contribution to conference › Paper › peer-review