Application of the deuterium sintering process to improve the device design rule in reducing plasma induced damages
- Young Kwang Kim
- , Seok Ha Lee
- , Hyui Seung Lee
- , Bong Seok Kim
- , Yong Hee Lee
- , Jinju Lee
- , Kangguo Cheng
- , Zhi Chen
- , Karl Hess
- , Joseph W. Lyding
Research output: Contribution to conference › Paper › peer-review