Correlation between microstructure and thermionic electron emission from Os-Ru thin films on dispenser cathodes

Phillip D. Swartzentruber, Thomas John Balk, Michael P. Effgen

Research output: Contribution to journalArticlepeer-review

13 Scopus citations

Abstract

Osmium-ruthenium films with different microstructures were deposited onto dispenser cathodes and subjected to 1000 h of close-spaced diode testing. Tailored microstructures were achieved by applying substrate biasing during deposition, and these were evaluated with scanning electron microscopy, x-ray diffraction, and energy dispersive x-ray spectroscopy before and after close-spaced diode testing. Knee temperatures determined from the close-spaced diode test data were used to evaluate cathode performance. Cathodes with a large {10-11} Os-Ru film texture possessed comparatively low knee temperatures. Furthermore, a low knee temperature correlated with a low effective work function as calculated from the close-spaced diode data. It is proposed that the formation of strong {10-11} texture is responsible for the superior performance of the cathode with a multilayered Os-Ru coating.

Original languageEnglish
Article number040601
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume32
Issue number4
DOIs
StatePublished - Jul 2014

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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