Crystallographic etching of few-layer graphene

Sujit S. Datta, Douglas R. Strachan, Samuel M. Khamis, A. T.Charlie Johnson

Research output: Contribution to journalArticlepeer-review

500 Scopus citations


We demonstrate a method by which few-layer graphene samples can be etched along crystallographic axes by thermally activated metallic nanoparticles. The technique results in long (>1 μm) crystallographic edges etched through to the insulating substrate, making the process potentially useful for atomically precise graphene device fabrication. This advance could enable atomically precise construction of integrated circuits from single graphene sheets with a wide range of technological applications.

Original languageEnglish
Pages (from-to)1912-1915
Number of pages4
JournalNano Letters
Issue number7
StatePublished - Jul 2008

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Mechanical Engineering


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