Cylindrical lens design with illuminance uniformity in the image plane of critical illumination system

Chong Huang, Haiqing Chen, Kun Zhang, Shuang Zhao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In object simulation equipment, field diaphragm is critical illuminated to obtain the maximum possible light energy. When light source is a tiny surface source, and beam is shaped with parabolic reflect mirror to parallelism. We design the cylindrical lens to reshape the parallel beam to elliptic image spot of 25.4mmx3mm, and imaging in the field diaphragm of simulation system. For the volume restriction, we design a refractive system employed by one piece of meniscus lens and two pieces of cylindrical lens. In x direction, the linear field of image is 25.4mm, and we bring in a certain amount of sphere aberration in order to make light energy uniform distribution in the direction. Meanwhile, in y direction, the image height accords to the requirement by controlling focus distance. Illuminance of marginal field of x direction reaches 95% of that of centre field, which satisfies the system requirement. The configuration of this lens is rather concise and hardly has any problem in processing.

Original languageEnglish
Title of host publication5th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publicationAdvanced Optical Manufacturing Technologies
EditionPART 1
DOIs
StatePublished - 2010
Event5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Dalian, China
Duration: Apr 26 2010Apr 29 2010

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
NumberPART 1
Volume7655
ISSN (Print)0277-786X

Conference

Conference5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Country/TerritoryChina
CityDalian
Period4/26/104/29/10

Keywords

  • back focus length
  • critical illumination
  • cylindrical lens
  • optical design

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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