Abstract
A study was performed on the diffusion-induced beam bending in hydrogen sensors. The linear elastic beam theory and Moutier theorem were used to analyze the bending of both the single-layer and bilayer beam structures. It was found that the mismatch strain was dependent on the concentration and the partial polar volume of the diffusing components in both the layers.
| Original language | English |
|---|---|
| Pages (from-to) | 9304-9309 |
| Number of pages | 6 |
| Journal | Journal of Applied Physics |
| Volume | 93 |
| Issue number | 11 |
| DOIs | |
| State | Published - Jun 1 2003 |
ASJC Scopus subject areas
- Physics and Astronomy (all)