Diffusion-induced beam bending in hydrogen sensors

Fuqian Yang, J. C.M. Li

Research output: Contribution to journalArticlepeer-review

53 Scopus citations


A study was performed on the diffusion-induced beam bending in hydrogen sensors. The linear elastic beam theory and Moutier theorem were used to analyze the bending of both the single-layer and bilayer beam structures. It was found that the mismatch strain was dependent on the concentration and the partial polar volume of the diffusing components in both the layers.

Original languageEnglish
Pages (from-to)9304-9309
Number of pages6
JournalJournal of Applied Physics
Issue number11
StatePublished - Jun 1 2003

ASJC Scopus subject areas

  • Physics and Astronomy (all)


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