A study was performed on the diffusion-induced beam bending in hydrogen sensors. The linear elastic beam theory and Moutier theorem were used to analyze the bending of both the single-layer and bilayer beam structures. It was found that the mismatch strain was dependent on the concentration and the partial polar volume of the diffusing components in both the layers.
|Number of pages||6|
|Journal||Journal of Applied Physics|
|State||Published - Jun 1 2003|
ASJC Scopus subject areas
- Physics and Astronomy (all)