Abstract
A study was performed on the diffusion-induced beam bending in hydrogen sensors. The linear elastic beam theory and Moutier theorem were used to analyze the bending of both the single-layer and bilayer beam structures. It was found that the mismatch strain was dependent on the concentration and the partial polar volume of the diffusing components in both the layers.
Original language | English |
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Pages (from-to) | 9304-9309 |
Number of pages | 6 |
Journal | Journal of Applied Physics |
Volume | 93 |
Issue number | 11 |
DOIs | |
State | Published - Jun 1 2003 |
ASJC Scopus subject areas
- General Physics and Astronomy