Elasto-Plastic Finite Element Analysis of Indentations in Free Abrasive Machining

Milind Bhagavat, Fuqian Yang, Imin Kao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

7 Scopus citations

Abstract

Free abrasive machining (FAM) using a wiresaw is emerging as a state of the art technology for slicing large diameter semiconductor wafers. Material removal in a FAM environment is known to be by rolling and indenting of abrasives into the cut media. Therefore, indentation by abrasives in the slurry is the single most important mechanism in wiresawing process. This paper deals with the importance of abrasive shape in material removal during FAM. To achieve this objective, indentation by conical rigid abrasives of different included angles has been investigated using finite element method (FEM). Typical indentation fracture involving median, radial and transverse cracking has been explained to the maximum level of sophistication attainable using static stress analysis. Some industrially relevant results pertaining to FAM in general and wiresawing in particular have been proposed.

Original languageEnglish
Title of host publicationManufacturing Science and Engineering
Pages819-824
Number of pages6
ISBN (Electronic)9780791816066
DOIs
StatePublished - 1998
EventASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998 - Anaheim, United States
Duration: Nov 15 1998Nov 20 1998

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume1998-R

Conference

ConferenceASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998
Country/TerritoryUnited States
CityAnaheim
Period11/15/9811/20/98

Bibliographical note

Publisher Copyright:
© 1998 American Society of Mechanical Engineers (ASME). All rights reserved.

ASJC Scopus subject areas

  • Mechanical Engineering

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