Electromigration-induced damage in bamboo Al interconnects

J. Böhm, C. A. Volkert, R. Mönig, T. J. Balk, E. Arzt

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Fingerprint

Dive into the research topics of 'Electromigration-induced damage in bamboo Al interconnects'. Together they form a unique fingerprint.

Material Science