Electron-beam-induced deposition of gold from aqueous solutions

G. Schardein; E. U. Donev; J. T. Hastings

doi:10.1088/0957-4484/22/1/015301

Electron-beam-induced deposition of gold from aqueous solutions

G. Schardein, E. U. Donev, J. T. Hastings

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

Focused electron-beam-induced deposition (EBID) using bulk liquid precursors is a novel approach to nanofabrication that has shown improvements in purity compared to EBID with gas-phase precursors. Here we report the first EBID of gold using bulk liquid precursors. We study the differences in gold deposited from three different aqueous solutions containing chloroauric acid (HAuCl₄), sodium tetrachloroaurate (NaAuCl₄), and the disulfitoaurate complex ([Au(SO₃)₂]^3-). We also examine the dependence of threshold dose upon precursor concentration and demonstrate high-resolution patterning with a pitch as small as 50 nm. Finally, we show that the purity of gold deposited using these liquid precursors is significantly improved in comparison with deposits from metal-organic gaseous precursors.

Original language	English
Article number	015301
Journal	Nanotechnology
Volume	22
Issue number	1
DOIs	https://doi.org/10.1088/0957-4484/22/1/015301
State	Published - Jan 7 2011

ASJC Scopus subject areas

Bioengineering
General Chemistry
General Materials Science
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0957-4484/22/1/015301

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@article{d6ad19090e334d9d9fcf69a44dad2b59,

title = "Electron-beam-induced deposition of gold from aqueous solutions",

abstract = "Focused electron-beam-induced deposition (EBID) using bulk liquid precursors is a novel approach to nanofabrication that has shown improvements in purity compared to EBID with gas-phase precursors. Here we report the first EBID of gold using bulk liquid precursors. We study the differences in gold deposited from three different aqueous solutions containing chloroauric acid (HAuCl4), sodium tetrachloroaurate (NaAuCl4), and the disulfitoaurate complex ([Au(SO3)2]3-). We also examine the dependence of threshold dose upon precursor concentration and demonstrate high-resolution patterning with a pitch as small as 50 nm. Finally, we show that the purity of gold deposited using these liquid precursors is significantly improved in comparison with deposits from metal-organic gaseous precursors.",

author = "G. Schardein and Donev, {E. U.} and Hastings, {J. T.}",

year = "2011",

month = jan,

day = "7",

doi = "10.1088/0957-4484/22/1/015301",

language = "English",

volume = "22",

number = "1",

}

TY - JOUR

T1 - Electron-beam-induced deposition of gold from aqueous solutions

AU - Schardein, G.

AU - Donev, E. U.

AU - Hastings, J. T.

PY - 2011/1/7

Y1 - 2011/1/7

N2 - Focused electron-beam-induced deposition (EBID) using bulk liquid precursors is a novel approach to nanofabrication that has shown improvements in purity compared to EBID with gas-phase precursors. Here we report the first EBID of gold using bulk liquid precursors. We study the differences in gold deposited from three different aqueous solutions containing chloroauric acid (HAuCl4), sodium tetrachloroaurate (NaAuCl4), and the disulfitoaurate complex ([Au(SO3)2]3-). We also examine the dependence of threshold dose upon precursor concentration and demonstrate high-resolution patterning with a pitch as small as 50 nm. Finally, we show that the purity of gold deposited using these liquid precursors is significantly improved in comparison with deposits from metal-organic gaseous precursors.

AB - Focused electron-beam-induced deposition (EBID) using bulk liquid precursors is a novel approach to nanofabrication that has shown improvements in purity compared to EBID with gas-phase precursors. Here we report the first EBID of gold using bulk liquid precursors. We study the differences in gold deposited from three different aqueous solutions containing chloroauric acid (HAuCl4), sodium tetrachloroaurate (NaAuCl4), and the disulfitoaurate complex ([Au(SO3)2]3-). We also examine the dependence of threshold dose upon precursor concentration and demonstrate high-resolution patterning with a pitch as small as 50 nm. Finally, we show that the purity of gold deposited using these liquid precursors is significantly improved in comparison with deposits from metal-organic gaseous precursors.

UR - http://www.scopus.com/inward/record.url?scp=79251591322&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79251591322&partnerID=8YFLogxK

U2 - 10.1088/0957-4484/22/1/015301

DO - 10.1088/0957-4484/22/1/015301

M3 - Article

C2 - 21135467

AN - SCOPUS:79251591322

SN - 0957-4484

VL - 22

JO - Nanotechnology

JF - Nanotechnology

IS - 1

M1 - 015301

ER -

Electron-beam-induced deposition of gold from aqueous solutions

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