Electron-beam-induced deposition of platinum from a liquid precursor

Eugenii U. Donev, J. Todd Hastings

Research output: Contribution to journalArticlepeer-review

78 Scopus citations

Abstract

We demonstrate here the first focused electron-beam-induced deposition (EBID) of nanostructures using a liquid precursor. We have deposited sub-50 nm platinum (Pt) wires and dots from a dilute, aqueous solution of chloroplatinic acid. Existing EBID processes rely on the electronbeam stimulated decomposition of gaseous precursors; as a result, the deposits are highly contaminated (up to 75 at. % carbon or 60 at. % phosphorus for Pt processes). In contrast, we show that deposition of platinum by electron-beam reduction of platinum ions from solution leads to high-purity deposits (̃10 at. % chlorine contamination) at rates at least ten times higher than those obtained with other platinum precursors. Liquid-phase EBID offers a new route to deterministic, three-dimensional, nanometer-scale structures composed of multiple materials without complex multistep processing. Thus, it may prove important for prototyping and low-volume production of nanoscale devices and for repair and modification of nanoscale masks and templates used in high-volume production.

Original languageEnglish
Pages (from-to)2715-2718
Number of pages4
JournalNano Letters
Volume9
Issue number7
DOIs
StatePublished - Jul 8 2009

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Mechanical Engineering

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