Evidence for energy coupling from the Si-D vibration mode to the Si-Si and Si-O vibration modes at the SiO2/Si interface

Zhi Chen, Jun Guo, Pangleen Ong

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

Abstract

The measurement of vibrational modes at the SiO2/Si interface by Fourier-transform infrared spectrometry (FT-IR) was presented. The theory was found correct for the experiments of breaking Si-H/D bonds using scanning tunneling microscope where oxide was not involved. A difference of 27cm -1 was found between the single crystal Si sample and the amorphous Si sample.

Original languageEnglish
Pages (from-to)2151-2153
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number11
DOIs
StatePublished - Sep 15 2003

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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