Excimer laser ablation of aluminum nitride

Janet K. Lumpp; Susan D. Allen

doi:10.1557/JMR.1997.0029

Excimer laser ablation of aluminum nitride

Janet K. Lumpp, Susan D. Allen

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Excimer laser wavelengths ablate aluminum nitride at rates up to 0.2 μm/pulse where the rate increases with decreasing background pressure and increasing fluence. The ablation threshold for A1N at 248 nm is approximately 2 J/cm². Blind vias are produced with flat bottoms, straight walls, and a decomposed metallic layer remaining on the surface. Ablation rate dependence on fluence saturates at high fluences due to absorption by the ablation plume. The influence of processing variables on ablation rate and ablation mechanisms are discussed. Statistical design of experiments is used to compare data sets.

Original language	English
Pages (from-to)	218-225
Number of pages	8
Journal	Journal of Materials Research
Volume	12
Issue number	1
DOIs	https://doi.org/10.1557/JMR.1997.0029
State	Published - 1997

Bibliographical note

Funding Information:
This work was sponsored by ARPA URI Contract No. N00014-91-J-4029. The experimental work was performed at the University of Iowa, Iowa City, IA.

Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/JMR.1997.0029

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title = "Excimer laser ablation of aluminum nitride",

abstract = "Excimer laser wavelengths ablate aluminum nitride at rates up to 0.2 μm/pulse where the rate increases with decreasing background pressure and increasing fluence. The ablation threshold for A1N at 248 nm is approximately 2 J/cm2. Blind vias are produced with flat bottoms, straight walls, and a decomposed metallic layer remaining on the surface. Ablation rate dependence on fluence saturates at high fluences due to absorption by the ablation plume. The influence of processing variables on ablation rate and ablation mechanisms are discussed. Statistical design of experiments is used to compare data sets.",

author = "Lumpp, {Janet K.} and Allen, {Susan D.}",

note = "Funding Information: This work was sponsored by ARPA URI Contract No. N00014-91-J-4029. The experimental work was performed at the University of Iowa, Iowa City, IA. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.",

year = "1997",

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language = "English",

volume = "12",

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AU - Lumpp, Janet K.

AU - Allen, Susan D.

N1 - Funding Information: This work was sponsored by ARPA URI Contract No. N00014-91-J-4029. The experimental work was performed at the University of Iowa, Iowa City, IA. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.

PY - 1997

Y1 - 1997

N2 - Excimer laser wavelengths ablate aluminum nitride at rates up to 0.2 μm/pulse where the rate increases with decreasing background pressure and increasing fluence. The ablation threshold for A1N at 248 nm is approximately 2 J/cm2. Blind vias are produced with flat bottoms, straight walls, and a decomposed metallic layer remaining on the surface. Ablation rate dependence on fluence saturates at high fluences due to absorption by the ablation plume. The influence of processing variables on ablation rate and ablation mechanisms are discussed. Statistical design of experiments is used to compare data sets.

AB - Excimer laser wavelengths ablate aluminum nitride at rates up to 0.2 μm/pulse where the rate increases with decreasing background pressure and increasing fluence. The ablation threshold for A1N at 248 nm is approximately 2 J/cm2. Blind vias are produced with flat bottoms, straight walls, and a decomposed metallic layer remaining on the surface. Ablation rate dependence on fluence saturates at high fluences due to absorption by the ablation plume. The influence of processing variables on ablation rate and ablation mechanisms are discussed. Statistical design of experiments is used to compare data sets.

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DO - 10.1557/JMR.1997.0029

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JO - Journal of Materials Research

JF - Journal of Materials Research

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ER -

Excimer laser ablation of aluminum nitride

Abstract

Bibliographical note

ASJC Scopus subject areas

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