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Excimer laser assisted deposition of metal films on aluminum nitride
Janet K. Lumpp
, Li Hua
, Sarmad Al-Banna
Electrical and Computer Engineering
Research output
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Contribution to journal
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Conference article
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peer-review
Overview
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Dive into the research topics of 'Excimer laser assisted deposition of metal films on aluminum nitride'. Together they form a unique fingerprint.
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Engineering
Excimer Laser
100%
Assisted Deposition
100%
Nitride
100%
High Thermal Conductivity
25%
Interconnects
25%
Customisation
25%
Laser System
25%
Metallizations
25%
Optical Lithography
25%
Microelectronics
25%
Thermal Coefficient of Expansion
25%
Multichip Modules
25%
Motion Control
25%
Patterning Technique
25%
Aluminum Oxide
25%
Chemical Vapor Deposition
25%
Vapor Deposition
25%
Electroless Copper Plating
25%
Seed Layer
25%
Material Science
Metal Film
100%
Aluminum Nitride
100%
Aluminum
50%
Electronic Circuit
50%
Aluminum Oxide
25%
Silicon
25%
Chemical Vapor Deposition
25%
Thermal Conductivity
25%
Ceramic Substrate
25%
Plating
25%
Thermal Expansion
25%