Fabrication and characterization of sputtered-carbon microelectrode arrays

G. Sreenivas, Simon S. Ang, Ingrid Fritsch, William D. Brown, Greg A. Gerhardt, Donald J. Woodward

Research output: Contribution to journalArticlepeer-review

86 Scopus citations


This paper describes a robust and reliable process for fabricating a novel sputter-deposited, thin-film carbon microelectrode array using standard integrated circuit technologies and silicon micromachining. Sputter-deposited carbon films were investigated as potential candidates for microelectrode materials. The surface properties and cross section of the microelectrode arrays were studied by atomic force microscopy and scanning electron microscopy, respectively. Electrical site impedance, crosstalk, and lifetime (dielectric integrity) of microelectrodes in the array were characterized. Electrochemical response of the microelectrodes to hexaammineruthenium(III) chloride and dopamine were investigated by fast-scan cyclic voltammetry and high-speed, computer-based chronoamperometry; results show that thin-film carbon microelectrodes are well-behaved electrochemically. The thin carbon films offer extremely good electrical, mechanical, and chemical properties and thus qualify as viable candidates for various electroanalytical applications, particularly acute neurophysiological studies.

Original languageEnglish
Pages (from-to)1858-1864
Number of pages7
JournalAnalytical Chemistry
Issue number11
StatePublished - 1996

ASJC Scopus subject areas

  • Analytical Chemistry


Dive into the research topics of 'Fabrication and characterization of sputtered-carbon microelectrode arrays'. Together they form a unique fingerprint.

Cite this