Fabrication of high-quality TiO2 nanotubes on conductive glasses

Shibin Li; Xiaohui Yang; Xiongbang Wei; Yaoyu Xuan; Zhi Chen; Yadong Jiang

doi:10.1149/06604.0229ecst

Fabrication of high-quality TiO₂ nanotubes on conductive glasses

Shibin Li, Xiaohui Yang, Xiongbang Wei, Yaoyu Xuan, Zhi Chen, Yadong Jiang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

High quality self-ordered TiO₂ nanotubes (TNTs) were grown on a conductive fluorine-doped tin oxide (FTO) coated glass by anodization of titanium thin film deposited atop. The result showed that high-density Ti films with good adhesion can be obtained by direct current (DC) magenetron sputtering at 200 °C. The dependence of the morphology of TiO₂ nanotube on anodization time was investigated by scanning electron microscope (SEM). The TiO₂ nanotubes were annealed at 500 °C for 180 min, which led to the transformation of the crystal structure from amorphous to anatase. The influence of the anodization time on the crystallization of nanotubes is discussed. The proposed low-cost method for fabricating TiO₂ nanotubes provides an approach to enhance the efficiency of dye-sensitized solar cells (DSSCs).

Original language	English
Title of host publication	Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5
Editors	F. Roozeboom, V. Narayanan, K. Kakushima, P. J. Timans, E. P. Gusev, Z. Karim, S. DeGendt
Pages	229-234
Number of pages	6
Edition	4
ISBN (Electronic)	9781607685395
DOIs	https://doi.org/10.1149/06604.0229ecst
State	Published - 2015
Event	Symposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5 - 227th ECS Meeting - Chicago, United States Duration: May 24 2015 → May 28 2015

Publication series

Name	ECS Transactions
Number	4
Volume	66
ISSN (Print)	1938-6737
ISSN (Electronic)	1938-5862

Conference

Conference	Symposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5 - 227th ECS Meeting
Country/Territory	United States
City	Chicago
Period	5/24/15 → 5/28/15

Bibliographical note

Publisher Copyright:
© The Electrochemical Society.

ASJC Scopus subject areas

General Engineering

Access to Document

10.1149/06604.0229ecst

Cite this

Li, S., Yang, X., Wei, X., Xuan, Y., Chen, Z., & Jiang, Y. (2015). Fabrication of high-quality TiO₂ nanotubes on conductive glasses. In F. Roozeboom, V. Narayanan, K. Kakushima, P. J. Timans, E. P. Gusev, Z. Karim, & S. DeGendt (Eds.), Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5 (4 ed., pp. 229-234). (ECS Transactions; Vol. 66, No. 4). https://doi.org/10.1149/06604.0229ecst

Li, Shibin ; Yang, Xiaohui ; Wei, Xiongbang et al. / Fabrication of high-quality TiO₂ nanotubes on conductive glasses. Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5. editor / F. Roozeboom ; V. Narayanan ; K. Kakushima ; P. J. Timans ; E. P. Gusev ; Z. Karim ; S. DeGendt. 4. ed. 2015. pp. 229-234 (ECS Transactions; 4).

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abstract = "High quality self-ordered TiO2 nanotubes (TNTs) were grown on a conductive fluorine-doped tin oxide (FTO) coated glass by anodization of titanium thin film deposited atop. The result showed that high-density Ti films with good adhesion can be obtained by direct current (DC) magenetron sputtering at 200 °C. The dependence of the morphology of TiO2 nanotube on anodization time was investigated by scanning electron microscope (SEM). The TiO2 nanotubes were annealed at 500 °C for 180 min, which led to the transformation of the crystal structure from amorphous to anatase. The influence of the anodization time on the crystallization of nanotubes is discussed. The proposed low-cost method for fabricating TiO2 nanotubes provides an approach to enhance the efficiency of dye-sensitized solar cells (DSSCs).",

author = "Shibin Li and Xiaohui Yang and Xiongbang Wei and Yaoyu Xuan and Zhi Chen and Yadong Jiang",

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Li, S, Yang, X, Wei, X, Xuan, Y, Chen, Z & Jiang, Y 2015, Fabrication of high-quality TiO₂ nanotubes on conductive glasses. in F Roozeboom, V Narayanan, K Kakushima, PJ Timans, EP Gusev, Z Karim & S DeGendt (eds), Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5. 4 edn, ECS Transactions, no. 4, vol. 66, pp. 229-234, Symposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5 - 227th ECS Meeting, Chicago, United States, 5/24/15. https://doi.org/10.1149/06604.0229ecst

Fabrication of high-quality TiO₂ nanotubes on conductive glasses. / Li, Shibin; Yang, Xiaohui; Wei, Xiongbang et al.
Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5. ed. / F. Roozeboom; V. Narayanan; K. Kakushima; P. J. Timans; E. P. Gusev; Z. Karim; S. DeGendt. 4. ed. 2015. p. 229-234 (ECS Transactions; Vol. 66, No. 4).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Yang, Xiaohui

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N2 - High quality self-ordered TiO2 nanotubes (TNTs) were grown on a conductive fluorine-doped tin oxide (FTO) coated glass by anodization of titanium thin film deposited atop. The result showed that high-density Ti films with good adhesion can be obtained by direct current (DC) magenetron sputtering at 200 °C. The dependence of the morphology of TiO2 nanotube on anodization time was investigated by scanning electron microscope (SEM). The TiO2 nanotubes were annealed at 500 °C for 180 min, which led to the transformation of the crystal structure from amorphous to anatase. The influence of the anodization time on the crystallization of nanotubes is discussed. The proposed low-cost method for fabricating TiO2 nanotubes provides an approach to enhance the efficiency of dye-sensitized solar cells (DSSCs).

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Li S, Yang X, Wei X, Xuan Y, Chen Z, Jiang Y. Fabrication of high-quality TiO₂ nanotubes on conductive glasses. In Roozeboom F, Narayanan V, Kakushima K, Timans PJ, Gusev EP, Karim Z, DeGendt S, editors, Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5. 4 ed. 2015. p. 229-234. (ECS Transactions; 4). doi: 10.1149/06604.0229ecst