High quality self-ordered TiO2 nanotubes (TNTs) were grown on a conductive fluorine-doped tin oxide (FTO) coated glass by anodization of titanium thin film deposited atop. The result showed that high-density Ti films with good adhesion can be obtained by direct current (DC) magenetron sputtering at 200 °C. The dependence of the morphology of TiO2 nanotube on anodization time was investigated by scanning electron microscope (SEM). The TiO2 nanotubes were annealed at 500 °C for 180 min, which led to the transformation of the crystal structure from amorphous to anatase. The influence of the anodization time on the crystallization of nanotubes is discussed. The proposed low-cost method for fabricating TiO2 nanotubes provides an approach to enhance the efficiency of dye-sensitized solar cells (DSSCs).
|Title of host publication||Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5|
|Editors||F. Roozeboom, V. Narayanan, K. Kakushima, P. J. Timans, E. P. Gusev, Z. Karim, S. DeGendt|
|Number of pages||6|
|State||Published - 2015|
|Event||Symposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5 - 227th ECS Meeting - Chicago, United States|
Duration: May 24 2015 → May 28 2015
|Conference||Symposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5 - 227th ECS Meeting|
|Period||5/24/15 → 5/28/15|
Bibliographical notePublisher Copyright:
© The Electrochemical Society.
ASJC Scopus subject areas
- Engineering (all)