Flexible Piezoresistive Sensors from Polydimethylsiloxane Films with Ridge-like Surface Structures

Ming Liu, Xianchao Liu, Fuqian Yang

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Developing flexible sensors and actuators is of paramount importance for wearable devices and systems. In this research, we developed a simple and facile technique to construct flexible piezoresistive sensors from polydimethylsiloxane films with ridge-like surface structures and laser-induced porous graphene. Using a replication strategy, we prepared the ridge-like surface structures from sandpapers. The piezoresistive sensors exhibit excellent sensitivity with a response time of less than 50 ms and long-term cyclic stability under mechanical loading. The smallest weight they can sense is ~96 mg. We demonstrated applications of the piezoresistive sensors in the sensing of bio-related activities, including muscle contraction, finger flexion, wrist flexion, elbow bending, knee bending, swallowing, respiration, sounds, and pulses.

Original languageEnglish
Article number1940
JournalMicromachines
Volume14
Issue number10
DOIs
StatePublished - Oct 2023

Bibliographical note

Publisher Copyright:
© 2023 by the authors.

Funding

This research was funded by the National Natural Science Foundation of China (grant No. 51705282); the State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology (grant No. DEMTKF2021013); the Engineering Research Center for CAD/CAM of Fujian Universities (Putian University) (grant No. K202208), and Fuzhou University Testing Fund of precious apparatus (grant No. 2023T018).

FundersFunder number
Fuzhou University Testing Fund2023T018
National Natural Science Foundation of P.R. China51705282
National Natural Science Foundation of P.R. China
Huazhong University of Science and TechnologyDEMTKF2021013
Huazhong University of Science and Technology
Putian UniversityK202208
Putian University
State Key Lab of Digital Manufacturing Equipment and Technology

    Keywords

    • PDMS
    • bio-applications
    • flexible sensor
    • surface structure

    ASJC Scopus subject areas

    • Control and Systems Engineering
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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