Flexible Piezoresistive Sensors from Polydimethylsiloxane Films with Ridge-like Surface Structures

Ming Liu, Xianchao Liu, Fuqian Yang

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Developing flexible sensors and actuators is of paramount importance for wearable devices and systems. In this research, we developed a simple and facile technique to construct flexible piezoresistive sensors from polydimethylsiloxane films with ridge-like surface structures and laser-induced porous graphene. Using a replication strategy, we prepared the ridge-like surface structures from sandpapers. The piezoresistive sensors exhibit excellent sensitivity with a response time of less than 50 ms and long-term cyclic stability under mechanical loading. The smallest weight they can sense is ~96 mg. We demonstrated applications of the piezoresistive sensors in the sensing of bio-related activities, including muscle contraction, finger flexion, wrist flexion, elbow bending, knee bending, swallowing, respiration, sounds, and pulses.

Original languageEnglish
Article number1940
JournalMicromachines
Volume14
Issue number10
DOIs
StatePublished - Oct 2023

Bibliographical note

Publisher Copyright:
© 2023 by the authors.

Keywords

  • PDMS
  • bio-applications
  • flexible sensor
  • surface structure

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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