Fluence dependence of excimer laser ablation of AIN

Janet K. Lumpp, Christopher N. Coretsopoulos, Susan D. Allen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


Aluminum nitride has been ablated with a KrF excimer laser (248nm) at fluences from 1 to 60 J/cm2. Ablation depth, emission spectra and photothermal beam deflection were detected as a function of fluence.

Original languageEnglish
Title of host publicationElectronic Packaging Materials Science VII
EditorsPeter Borgesen, Klavs F. Jensen, Roger A. Pollak
Number of pages6
StatePublished - 1994
EventProceedings of the Fall 1993 MRS Meeting - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


ConferenceProceedings of the Fall 1993 MRS Meeting
CityBoston, MA, USA

ASJC Scopus subject areas

  • Materials Science (all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


Dive into the research topics of 'Fluence dependence of excimer laser ablation of AIN'. Together they form a unique fingerprint.

Cite this