Fluence dependence of excimer laser ablation of AIN

Janet K. Lumpp; Christopher N. Coretsopoulos; Susan D. Allen

Fluence dependence of excimer laser ablation of AIN

Janet K. Lumpp, Christopher N. Coretsopoulos, Susan D. Allen

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

Aluminum nitride has been ablated with a KrF excimer laser (248nm) at fluences from 1 to 60 J/cm². Ablation depth, emission spectra and photothermal beam deflection were detected as a function of fluence.

Original language	English
Title of host publication	Electronic Packaging Materials Science VII
Editors	Peter Borgesen, Klavs F. Jensen, Roger A. Pollak
Pages	213-218
Number of pages	6
State	Published - 1994
Event	Proceedings of the Fall 1993 MRS Meeting - Boston, MA, USA Duration: Nov 29 1993 → Dec 3 1993

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	323
ISSN (Print)	0272-9172

Conference

Conference	Proceedings of the Fall 1993 MRS Meeting
City	Boston, MA, USA
Period	11/29/93 → 12/3/93

ASJC Scopus subject areas

Materials Science (all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

@inproceedings{21fe70d34bf948409f88ab0db1699d24,

title = "Fluence dependence of excimer laser ablation of AIN",

abstract = "Aluminum nitride has been ablated with a KrF excimer laser (248nm) at fluences from 1 to 60 J/cm2. Ablation depth, emission spectra and photothermal beam deflection were detected as a function of fluence.",

author = "Lumpp, {Janet K.} and Coretsopoulos, {Christopher N.} and Allen, {Susan D.}",

year = "1994",

language = "English",

isbn = "1558992227",

series = "Materials Research Society Symposium Proceedings",

pages = "213--218",

editor = "Peter Borgesen and Jensen, {Klavs F.} and Pollak, {Roger A.}",

booktitle = "Electronic Packaging Materials Science VII",

note = "Proceedings of the Fall 1993 MRS Meeting ; Conference date: 29-11-1993 Through 03-12-1993",

}

Fluence dependence of excimer laser ablation of AIN. / Lumpp, Janet K.; Coretsopoulos, Christopher N.; Allen, Susan D.
Electronic Packaging Materials Science VII. ed. / Peter Borgesen; Klavs F. Jensen; Roger A. Pollak. 1994. p. 213-218 (Materials Research Society Symposium Proceedings; Vol. 323).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fluence dependence of excimer laser ablation of AIN

AU - Lumpp, Janet K.

AU - Coretsopoulos, Christopher N.

AU - Allen, Susan D.

PY - 1994

Y1 - 1994

N2 - Aluminum nitride has been ablated with a KrF excimer laser (248nm) at fluences from 1 to 60 J/cm2. Ablation depth, emission spectra and photothermal beam deflection were detected as a function of fluence.

AB - Aluminum nitride has been ablated with a KrF excimer laser (248nm) at fluences from 1 to 60 J/cm2. Ablation depth, emission spectra and photothermal beam deflection were detected as a function of fluence.

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M3 - Conference contribution

AN - SCOPUS:0027931910

SN - 1558992227

T3 - Materials Research Society Symposium Proceedings

SP - 213

EP - 218

BT - Electronic Packaging Materials Science VII

A2 - Borgesen, Peter

A2 - Jensen, Klavs F.

A2 - Pollak, Roger A.

T2 - Proceedings of the Fall 1993 MRS Meeting

Y2 - 29 November 1993 through 3 December 1993

ER -

Fluence dependence of excimer laser ablation of AIN

Abstract

Publication series

Conference

ASJC Scopus subject areas

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