Fundamental connection between hydrogen/deuterium desorption at silicon surfaces in ultrahigh vacuum and at oxide/silicon interfaces in metal-oxide-semiconductor devices

Kangguo Cheng, Jinju Lee, Zhi Chen, Samir A. Shah, Karl Hess, Jean Pierre Leburton, Joseph W. Lyding

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

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