Fundamental mechanisms for reduction of leakage current of silicon oxide and oxynitride through RTP-induced phonon-energy coupling

Zhi Chen, Jun Guo, Pangleen Ong

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Fingerprint

Dive into the research topics of 'Fundamental mechanisms for reduction of leakage current of silicon oxide and oxynitride through RTP-induced phonon-energy coupling'. Together they form a unique fingerprint.

Engineering

Material Science