Gold Ion Beam Milled Gold Zero-Mode Waveguides

Troy C. Messina, Bernadeta R. Srijanto, Charles Patrick Collier, Ivan I. Kravchenko, Christopher I. Richards

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Zero-mode waveguides (ZMWs) are widely used in single molecule fluorescence microscopy for their enhancement of emitted light and the ability to study samples at physiological concentrations. ZMWs are typically produced using photo or electron beam lithography. We report a new method of ZMW production using focused ion beam (FIB) milling with gold ions. We demonstrate that ion-milled gold ZMWs with 200 nm apertures exhibit similar plasmon-enhanced fluorescence seen with ZMWs fabricated with traditional techniques such as electron beam lithography.

Original languageEnglish
Article number1755
Issue number10
StatePublished - May 1 2022

Bibliographical note

Funding Information:
Funding: This work was funded by the Appalachian College Association Faculty Fellowship program and NIH grant R01GM138837.

Publisher Copyright:
© 2022 by the authors. Licensee MDPI, Basel, Switzerland.


  • nanostructures
  • single molecule
  • single molecule spectroscopy
  • sub-wavelength apertures
  • zero-mode waveguides

ASJC Scopus subject areas

  • Chemical Engineering (all)
  • Materials Science (all)


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