Growth of well-aligned carbon nanotube arrays on silicon substrates using porous alumina film as a nanotemplate

Wenchong Hu; Dawei Gong; Zhi Chen; Liming Yuan; Kozo Saito; Craig A. Grimes; Padmakar Kichambare

doi:10.1063/1.1415406

Growth of well-aligned carbon nanotube arrays on silicon substrates using porous alumina film as a nanotemplate

Wenchong Hu, Dawei Gong, Zhi Chen, Liming Yuan, Kozo Saito, Craig A. Grimes, Padmakar Kichambare

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

113 Scopus citations

Abstract

Aligned, open-tipped carbon nanotube arrays of high density and uniformity were synthesized via a flame method on silicon substrates using a nanoporous template of anodized aluminum oxide from which the nanotubes were grown. The diameter and length of the nanotubes are controlled by the geometry of the aluminum oxide template. These results show the feasibility of integration between carbon nanotube arrays and silicon microelectronics.

Original language	English
Pages (from-to)	3083-3085
Number of pages	3
Journal	Applied Physics Letters
Volume	79
Issue number	19
DOIs	https://doi.org/10.1063/1.1415406
State	Published - Nov 5 2001

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1415406

Cite this

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title = "Growth of well-aligned carbon nanotube arrays on silicon substrates using porous alumina film as a nanotemplate",

abstract = "Aligned, open-tipped carbon nanotube arrays of high density and uniformity were synthesized via a flame method on silicon substrates using a nanoporous template of anodized aluminum oxide from which the nanotubes were grown. The diameter and length of the nanotubes are controlled by the geometry of the aluminum oxide template. These results show the feasibility of integration between carbon nanotube arrays and silicon microelectronics.",

author = "Wenchong Hu and Dawei Gong and Zhi Chen and Liming Yuan and Kozo Saito and Grimes, {Craig A.} and Padmakar Kichambare",

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AU - Hu, Wenchong

AU - Gong, Dawei

AU - Chen, Zhi

AU - Yuan, Liming

AU - Saito, Kozo

AU - Grimes, Craig A.

AU - Kichambare, Padmakar

PY - 2001/11/5

Y1 - 2001/11/5

N2 - Aligned, open-tipped carbon nanotube arrays of high density and uniformity were synthesized via a flame method on silicon substrates using a nanoporous template of anodized aluminum oxide from which the nanotubes were grown. The diameter and length of the nanotubes are controlled by the geometry of the aluminum oxide template. These results show the feasibility of integration between carbon nanotube arrays and silicon microelectronics.

AB - Aligned, open-tipped carbon nanotube arrays of high density and uniformity were synthesized via a flame method on silicon substrates using a nanoporous template of anodized aluminum oxide from which the nanotubes were grown. The diameter and length of the nanotubes are controlled by the geometry of the aluminum oxide template. These results show the feasibility of integration between carbon nanotube arrays and silicon microelectronics.

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Growth of well-aligned carbon nanotube arrays on silicon substrates using porous alumina film as a nanotemplate

Abstract

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