Highly sensitive and stable flexible pressure sensors with micro-structured electrodes

Yong Quan, Xiongbang Wei, Lun Xiao, Tao Wu, Hanying Pang, Tengfei Liu, Wen Huang, Shuanghong Wu, Shibin Li, Zhi Chen

Research output: Contribution to journalArticlepeer-review

48 Scopus citations

Abstract

Flexible sensors are very important for a broad range of applications including wearable health care systems, human-machine interfacing devices, and artificial intelligence. Due to their unique capability, flexible sensors have attracted increasing attention. Here we report flexible capacitive micro-structured sensors based on a sandwich structure by laminating the silver nanowires (AgNWs) composite and the polydimethylsiloxane (PDMS) film together with PDMS as a dielectric layer. To better understand the performance of the sensors, we compare the flexible pressure sensors with micro-structured electrodes to that without one. The reported sensors with micro-structured electrodes demonstrate better performance with higher sensitivity (1.1 kPa−1), lower detection (1Pa), a faster response time (<1s) and better stability than that of the sensors without microstructures.

Original languageEnglish
Pages (from-to)824-831
Number of pages8
JournalJournal of Alloys and Compounds
Volume699
DOIs
StatePublished - 2017

Bibliographical note

Funding Information:
This work was supported by National Natural Science Foundation of China under Grant Nos.61474016 and 61101030, 61371046, 61421002, 61405026. ZC was also partially supported by University of Kentucky.

Publisher Copyright:
© 2017 Elsevier B.V.

Keywords

  • Capacitive flexible pressure sensor
  • Frequency oscillation method
  • Micro-structured electrode
  • Silver nanowire

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

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