The effect of external stress on hydrogen-induced silicon wafer splitting was studied using the linear elastic theory and thermodynamics. The effect of the formation of molecular hydrogen on the nucleation of microcracks in the hydrogen-implanted region was also investigated. A kinetic theory was formulated to study the growth behavior of the microcrack.
|Number of pages||4|
|Journal||Journal of Applied Physics|
|State||Published - Aug 1 2003|
ASJC Scopus subject areas
- Physics and Astronomy (all)