Abstract
The effect of external stress on hydrogen-induced silicon wafer splitting was studied using the linear elastic theory and thermodynamics. The effect of the formation of molecular hydrogen on the nucleation of microcracks in the hydrogen-implanted region was also investigated. A kinetic theory was formulated to study the growth behavior of the microcrack.
| Original language | English |
|---|---|
| Pages (from-to) | 1454-1457 |
| Number of pages | 4 |
| Journal | Journal of Applied Physics |
| Volume | 94 |
| Issue number | 3 |
| DOIs | |
| State | Published - Aug 1 2003 |
ASJC Scopus subject areas
- Physics and Astronomy (all)