Abstract
The effect of external stress on hydrogen-induced silicon wafer splitting was studied using the linear elastic theory and thermodynamics. The effect of the formation of molecular hydrogen on the nucleation of microcracks in the hydrogen-implanted region was also investigated. A kinetic theory was formulated to study the growth behavior of the microcrack.
Original language | English |
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Pages (from-to) | 1454-1457 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 94 |
Issue number | 3 |
DOIs | |
State | Published - Aug 1 2003 |
ASJC Scopus subject areas
- General Physics and Astronomy