Hydrogen-induced silicon wafer splitting

Research output: Contribution to journalArticlepeer-review

15 Scopus citations


The effect of external stress on hydrogen-induced silicon wafer splitting was studied using the linear elastic theory and thermodynamics. The effect of the formation of molecular hydrogen on the nucleation of microcracks in the hydrogen-implanted region was also investigated. A kinetic theory was formulated to study the growth behavior of the microcrack.

Original languageEnglish
Pages (from-to)1454-1457
Number of pages4
JournalJournal of Applied Physics
Issue number3
StatePublished - Aug 1 2003

ASJC Scopus subject areas

  • Physics and Astronomy (all)


Dive into the research topics of 'Hydrogen-induced silicon wafer splitting'. Together they form a unique fingerprint.

Cite this