Abstract
The spherical indentation of elastic film /substrate structures is analyzed using the finite element method. The load-displacement curves of the film /substrate structures of various configurations are obtained and analyzed. A generalized power law relation is established, which can be used to analyze the load-displacement curve of elastic film /substrate systems under spherical indentations. The indentation load is dependent on the modulus ratio of the film to the substrate and film thickness. A semi-analytical expression for the power of the power law relation is also obtained as a function of the normalized film thickness and normalized film modulus, which can be used to determine the modulus of the film from a spherical indentation test.
| Original language | English |
|---|---|
| Pages (from-to) | 1-17 |
| Number of pages | 17 |
| Journal | Computers, Materials and Continua |
| Volume | 20 |
| Issue number | 1 |
| State | Published - 2010 |
Keywords
- Finite element method
- Nanoindentation
- Thin film
ASJC Scopus subject areas
- Biomaterials
- Modeling and Simulation
- Mechanics of Materials
- Computer Science Applications
- Electrical and Electronic Engineering