Industrial applications for LIGA-fabricated micro heat exchangers

Kevin W. Kelly, Chad Harris, Lyndon S. Stephens, Christophe Marques, Dan Foley

Research output: Contribution to journalConference articlepeer-review

14 Scopus citations


One of the well-known benefits of micro scale is enhanced heat transfer. This fact provides the motivation for fabricating a variety of micro heat exchangers using derivatives of the LIGA micromachining process. These heat exchangers can be made of polymers (PMMA), nickel (electroplated or electroless), or ceramics (Si3N4 and alumina are presently being investigated). These heat exchangers are envisioned for applications such as gas turbine blades, mechanical seals and/or bearings, boilers, condensers, radiators, evaporators, electronic component cooling, and catalytic converters. In this paper, methods to fabricate an array of heat exchangers for different applications are described. In addition, simple analytic models that illustrate the motivation for fabricating micro cross flow heat exchangers are shown to compare favorably with experimental heat transfer results.

Original languageEnglish
Pages (from-to)73-84
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2001
EventMEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - San Francisco, CA, United States
Duration: Oct 22 2001Oct 23 2001


  • Cross flow heat exchanger
  • LIGA
  • Mechanical seal
  • Silicon nitride HARMs

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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