Abstract
One of the well-known benefits of micro scale is enhanced heat transfer. This fact provides the motivation for fabricating a variety of micro heat exchangers using derivatives of the LIGA micromachining process. These heat exchangers can be made of polymers (PMMA), nickel (electroplated or electroless), or ceramics (Si3N4 and alumina are presently being investigated). These heat exchangers are envisioned for applications such as gas turbine blades, mechanical seals and/or bearings, boilers, condensers, radiators, evaporators, electronic component cooling, and catalytic converters. In this paper, methods to fabricate an array of heat exchangers for different applications are described. In addition, simple analytic models that illustrate the motivation for fabricating micro cross flow heat exchangers are shown to compare favorably with experimental heat transfer results.
| Original language | English |
|---|---|
| Pages (from-to) | 73-84 |
| Number of pages | 12 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4559 |
| DOIs | |
| State | Published - 2001 |
| Event | MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - San Francisco, CA, United States Duration: Oct 22 2001 → Oct 23 2001 |
Keywords
- Cross flow heat exchanger
- LIGA
- Mechanical seal
- Silicon nitride HARMs
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering