TY - JOUR
T1 - Liquid phase electron-beam-induced deposition on bulk substrates using environmental scanning electron microscopy
AU - Bresin, Matthew
AU - Botman, Aurelien
AU - Randolph, Steven J.
AU - Straw, Marcus
AU - Hastings, Jeffrey Todd
PY - 2014/4
Y1 - 2014/4
N2 - The introduction of gases, such as water vapor, into an environmental scanning electron microscope is common practice to assist in the imaging of insulating or biological materials. However, this capability may also be exploited to introduce, or form, liquid phase precursors for electron-beam-induced deposition. In this work, the authors report the deposition of silver (Ag) and copper (Cu) structures using two different cell-less in situ deposition methods - the first involving the in situ hydration of solid precursors and the second involving the insertion of liquid droplets using a capillary style liquid injection system. Critically, the inclusion of surfactants is shown to drastically improve pattern replication without diminishing the purity of the metal deposits. Surfactants are estimated to reduce the droplet contact angle to below ~10°.
AB - The introduction of gases, such as water vapor, into an environmental scanning electron microscope is common practice to assist in the imaging of insulating or biological materials. However, this capability may also be exploited to introduce, or form, liquid phase precursors for electron-beam-induced deposition. In this work, the authors report the deposition of silver (Ag) and copper (Cu) structures using two different cell-less in situ deposition methods - the first involving the in situ hydration of solid precursors and the second involving the insertion of liquid droplets using a capillary style liquid injection system. Critically, the inclusion of surfactants is shown to drastically improve pattern replication without diminishing the purity of the metal deposits. Surfactants are estimated to reduce the droplet contact angle to below ~10°.
KW - contact angle
KW - electron-beam-induced deposition
KW - liquid injection system
KW - liquid phase
KW - nanolithography
UR - http://www.scopus.com/inward/record.url?scp=84899058266&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84899058266&partnerID=8YFLogxK
U2 - 10.1017/S1431927614000117
DO - 10.1017/S1431927614000117
M3 - Article
AN - SCOPUS:84899058266
SN - 1431-9276
VL - 20
SP - 376
EP - 384
JO - Microscopy and Microanalysis
JF - Microscopy and Microanalysis
IS - 2
ER -