Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors

P. Wang; S. J.A. Majerus; R. Karam; B. Hanzlicek; D. L. Lin; H. Zhu; J. M. Anderson; M. S. Damaser; C. A. Zorman; W. H. Ko

doi:10.1109/TRANSDUCERS.2015.7180966

Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors

P. Wang, S. J.A. Majerus, R. Karam, B. Hanzlicek, D. L. Lin, H. Zhu, J. M. Anderson, M. S. Damaser, C. A. Zorman, W. H. Ko

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

13 Scopus citations

Abstract

This paper reports long-term evaluation of a micropackage technology for an implantable MEMS pressure sensor. The all-polymer micropackage survived > 160 days when subjected to accelerated lifetime testing at 85°C in a 1% wt. saline solution. The package exhibited minimum impact on sensitivity and linearity, which deviated by less than 5% and 0.3%, respectively. A 6-month in vivo evaluation of 16 MEMS-based pressure sensors showed that the micropackage exhibits good biocompatibility and provides excellent protection. To the best of our knowledge, these results establish new lifetime records for devices packaged using an all-polymer micropackaging approach.

Original language	English
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Pages	484-487
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7180966
State	Published - Aug 5 2015
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: Jun 21 2015 → Jun 25 2015

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	6/21/15 → 6/25/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

Non-hermetic micropackage
PDMS
Parylene-C
biocompatibility
encapsulation
packaging
pressure sensor

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2015.7180966

Cite this

Wang, P., Majerus, S. J. A., Karam, R., Hanzlicek, B., Lin, D. L., Zhu, H., Anderson, J. M., Damaser, M. S., Zorman, C. A., & Ko, W. H. (2015). Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 484-487). Article 7180966 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). https://doi.org/10.1109/TRANSDUCERS.2015.7180966

Wang, P. ; Majerus, S. J.A. ; Karam, R. et al. / Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. 2015. pp. 484-487 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

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title = "Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors",

abstract = "This paper reports long-term evaluation of a micropackage technology for an implantable MEMS pressure sensor. The all-polymer micropackage survived > 160 days when subjected to accelerated lifetime testing at 85°C in a 1% wt. saline solution. The package exhibited minimum impact on sensitivity and linearity, which deviated by less than 5% and 0.3%, respectively. A 6-month in vivo evaluation of 16 MEMS-based pressure sensors showed that the micropackage exhibits good biocompatibility and provides excellent protection. To the best of our knowledge, these results establish new lifetime records for devices packaged using an all-polymer micropackaging approach.",

keywords = "Non-hermetic micropackage, PDMS, Parylene-C, biocompatibility, encapsulation, packaging, pressure sensor",

author = "P. Wang and Majerus, {S. J.A.} and R. Karam and B. Hanzlicek and Lin, {D. L.} and H. Zhu and Anderson, {J. M.} and Damaser, {M. S.} and Zorman, {C. A.} and Ko, {W. H.}",

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year = "2015",

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doi = "10.1109/TRANSDUCERS.2015.7180966",

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Wang, P, Majerus, SJA, Karam, R, Hanzlicek, B, Lin, DL, Zhu, H, Anderson, JM, Damaser, MS, Zorman, CA & Ko, WH 2015, Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7180966, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, pp. 484-487, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 6/21/15. https://doi.org/10.1109/TRANSDUCERS.2015.7180966

Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors. / Wang, P.; Majerus, S. J.A.; Karam, R. et al.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. 2015. p. 484-487 7180966 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Wang, P.

AU - Majerus, S. J.A.

AU - Karam, R.

AU - Hanzlicek, B.

AU - Lin, D. L.

AU - Zhu, H.

AU - Anderson, J. M.

AU - Damaser, M. S.

AU - Zorman, C. A.

AU - Ko, W. H.

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N2 - This paper reports long-term evaluation of a micropackage technology for an implantable MEMS pressure sensor. The all-polymer micropackage survived > 160 days when subjected to accelerated lifetime testing at 85°C in a 1% wt. saline solution. The package exhibited minimum impact on sensitivity and linearity, which deviated by less than 5% and 0.3%, respectively. A 6-month in vivo evaluation of 16 MEMS-based pressure sensors showed that the micropackage exhibits good biocompatibility and provides excellent protection. To the best of our knowledge, these results establish new lifetime records for devices packaged using an all-polymer micropackaging approach.

AB - This paper reports long-term evaluation of a micropackage technology for an implantable MEMS pressure sensor. The all-polymer micropackage survived > 160 days when subjected to accelerated lifetime testing at 85°C in a 1% wt. saline solution. The package exhibited minimum impact on sensitivity and linearity, which deviated by less than 5% and 0.3%, respectively. A 6-month in vivo evaluation of 16 MEMS-based pressure sensors showed that the micropackage exhibits good biocompatibility and provides excellent protection. To the best of our knowledge, these results establish new lifetime records for devices packaged using an all-polymer micropackaging approach.

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Wang P, Majerus SJA, Karam R, Hanzlicek B, Lin DL, Zhu H et al. Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. 2015. p. 484-487. 7180966. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7180966

Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors

Abstract

Publication series

Conference

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

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