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Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors
P. Wang, S. J.A. Majerus, R. Karam, B. Hanzlicek, D. L. Lin, H. Zhu, J. M. Anderson, M. S. Damaser, C. A. Zorman, W. H. Ko
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
13
Scopus
citations