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Manufacturing multi-level metal CMOS with deuterium for improved hot carrier reliability
I. C. Kizilyalli, G. Abeln, Z. Chen, G. Weber, F. Register, E. Harris, S. Chetlur, G. Higashi, M. Schofieled, S. Sen, B. Kotzias, P. K. Roy, J. Lyding, K. Hess
Research output: Contribution to journal › Conference article › peer-review