Micro-indentation relaxation measurements in polymer thin films

D. M. Shinozaki, Y. Lu

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


A micro-indenter consisting of a piezo-electric driven flat cylindrical punch has been used to measure the dynamic mechanical properties of polystyrene films as thin as 50 μm. The measured viscoelastic response was sensitive to the bonding of the polystyrene to an underlying silicon substrate for films which were thinner than one indenter diameter. The instrument therefore was shown to have practical use in measuring the dynamic mechanical response of polymer films, and the strength of bonding between disparate materials.

Original languageEnglish
Pages (from-to)852-858
Number of pages7
JournalJournal of Electronic Materials
Issue number7
StatePublished - Jul 1997

Bibliographical note

Funding Information:
This work has been supported by the Natural Sciences and Engineering Research Council of Canada.


  • Dynamic mechanical test
  • Microindentation
  • Polymer films
  • Polystyrene
  • Viscoelastic

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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