MOS hydrogen sensor with very fast response based on ultra-thin thermal SiO₂ film

Engineering

• Sensor 100%
• Sio2 Film 100%
• Fast Response 100%
• Silicon Dioxide 66%
• Mechanisms 33%
• Gas Sensor 33%
• Hydrogen Gas 33%
• Enhanced Signal 33%
• Dry Oxidation 33%
• Low Cost 33%
• Thickness 33%
• Response Time 33%
• Silicon Wafer 33%

Material Science

• Devices 100%
• Film 100%
• Capacitor 100%
• Gas 100%
• Detector 50%
• Oxidation Reaction 50%
• Silicon Wafer 50%
• Oxide Compound 50%