Multi-level metal CMOS manufacturing with deuterium for improved hot carrier reliability
- I. C. Kizilyalli
- , G. Weber
- , Z. Chen
- , G. Abeln
- , M. Schofield
- , B. Kotzias
- , F. Register
- , E. Harris
- , S. Sen
- , S. Chetlur
- , M. Patel
- , L. Stirling
- , R. Huang
- , A. Massengale
- , P. K. Roy
Research output: Contribution to journal › Conference article › peer-review
8
Scopus
citations