@inproceedings{09d99b2a9378441caf9b8658e5e62813,
title = "Nanoimprinted SU-8 nanopillars and hierarchically branched nanowires by anodic aluminum oxide templates and their optical properties",
abstract = "We fabricated well-dispersed SU-8 nanopillars and hierarchically branched nanowires using nanoimprinted method. Anodic aluminum oxide (AAO) templates with branched pore structures were used as templates. We successfully fabricated high density, large aspect ratio, and large area SU-8 patterns. It provides a convenient and powerful approach to produce complicated nanostructures on SU-8 photoresist. The optical reflectivity was measured to characterize the SU-8 surface. Unique optical properties could be observed from these SU-8 nanopillar structures.",
keywords = "AAO, Nanoimprint, Nanowire, SU-8",
author = "Jun Fang and Youngsik Song and Zhi Chen",
year = "2010",
doi = "10.1109/UGIM.2010.5508934",
language = "English",
isbn = "9781424447329",
series = "Biennial University/Government/Industry Microelectronics Symposium - Proceedings",
booktitle = "2010 18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010 - Proceedings",
note = "18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010 ; Conference date: 28-06-2010 Through 01-07-2010",
}