Nanoimprinted SU-8 nanopillars and hierarchically branched nanowires by anodic aluminum oxide templates and their optical properties

Jun Fang, Youngsik Song, Zhi Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We fabricated well-dispersed SU-8 nanopillars and hierarchically branched nanowires using nanoimprinted method. Anodic aluminum oxide (AAO) templates with branched pore structures were used as templates. We successfully fabricated high density, large aspect ratio, and large area SU-8 patterns. It provides a convenient and powerful approach to produce complicated nanostructures on SU-8 photoresist. The optical reflectivity was measured to characterize the SU-8 surface. Unique optical properties could be observed from these SU-8 nanopillar structures.

Original languageEnglish
Title of host publication2010 18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010 - Proceedings
DOIs
StatePublished - 2010
Event18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010 - West Lafayette, IN, United States
Duration: Jun 28 2010Jul 1 2010

Publication series

NameBiennial University/Government/Industry Microelectronics Symposium - Proceedings
ISSN (Print)0749-6877

Conference

Conference18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010
Country/TerritoryUnited States
CityWest Lafayette, IN
Period6/28/107/1/10

Keywords

  • AAO
  • Nanoimprint
  • Nanowire
  • SU-8

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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