Original language | English |
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Pages (from-to) | 2650-2656 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 21 |
Issue number | 6 |
DOIs | |
State | Published - 2003 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering