| Original language | English |
|---|---|
| Pages (from-to) | 2650-2656 |
| Number of pages | 7 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 21 |
| Issue number | 6 |
| DOIs | |
| State | Published - 2003 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
Fingerprint
Dive into the research topics of 'Nanometer-level stitching in raster-scanning electron-beam lithography using spatial-phase locking'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver