Nanoporous Pd film sensors for detection of high concentration hydrogen

Ding Dongyan, Chen Zhi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

Blistering of Pd films upon absorption of high concentration hydrogen is one of the big problems for hindering wide application of Pd-film hydrogen sensors. We fabricated robust nanoporous Pd sensors with anodic aluminum oxide (AAO) as a substrate and Ni as a transition layer. The resistive sensors have a quick and reversible response to hydrogen gas at room temperature. Unlike dense Pd films supported by traditional wafers, the AAO-supported nanoporous films are highly stable in detecting high concentration hydrogen (up to 10% H 2).

Original languageEnglish
Title of host publication2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Pages777-780
Number of pages4
StatePublished - 2006
Event2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006 - Cincinnati, OH, United States
Duration: Jun 17 2006Jun 20 2006

Publication series

Name2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Volume2

Conference

Conference2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Country/TerritoryUnited States
CityCincinnati, OH
Period6/17/066/20/06

Keywords

  • Hydrogen sensor
  • Nanoporous Pd
  • Resistance
  • Stablity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Science (all)

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