Abstract
We report on the development of a non-hermetic micropackage technology that employs multiple layers of polydimethylsiloxane (PDMS), epoxy, and parylene-C thin films for conformai coating of chronic biomedical implantable systems with laboratory testing results in saline bath at 85°C, achieving very long micropackaging lifetime (up to ∼2-5 years). By combining experiments of material characterization and qualitative analysis of the observations, we explain the measured long lifetimes of the micropackages (projected equivalent of ∼2-5 years) using these non-hermetic coating materials and composites.
Original language | English |
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Pages | 166-170 |
Number of pages | 5 |
State | Published - 2013 |
Event | 46th Annual IMAPS International Symposium on Microelectronics, IMAPS 2013 - Orlando, FL, United States Duration: Sep 30 2013 → Oct 3 2013 |
Conference
Conference | 46th Annual IMAPS International Symposium on Microelectronics, IMAPS 2013 |
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Country/Territory | United States |
City | Orlando, FL |
Period | 9/30/13 → 10/3/13 |
Keywords
- Epoxy
- Lifetime
- MEMS
- Micropackage
- Non-hermetic package
- PDMS
- Parylene
- Permeability
ASJC Scopus subject areas
- Electrical and Electronic Engineering